JPH0650983Y2 - 薄膜形成装置の基板カート - Google Patents

薄膜形成装置の基板カート

Info

Publication number
JPH0650983Y2
JPH0650983Y2 JP7138888U JP7138888U JPH0650983Y2 JP H0650983 Y2 JPH0650983 Y2 JP H0650983Y2 JP 7138888 U JP7138888 U JP 7138888U JP 7138888 U JP7138888 U JP 7138888U JP H0650983 Y2 JPH0650983 Y2 JP H0650983Y2
Authority
JP
Japan
Prior art keywords
substrate
cart
holder
film forming
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP7138888U
Other languages
English (en)
Japanese (ja)
Other versions
JPH01174922U (en]
Inventor
正義 今村
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP7138888U priority Critical patent/JPH0650983Y2/ja
Publication of JPH01174922U publication Critical patent/JPH01174922U/ja
Application granted granted Critical
Publication of JPH0650983Y2 publication Critical patent/JPH0650983Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP7138888U 1988-05-30 1988-05-30 薄膜形成装置の基板カート Expired - Lifetime JPH0650983Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7138888U JPH0650983Y2 (ja) 1988-05-30 1988-05-30 薄膜形成装置の基板カート

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7138888U JPH0650983Y2 (ja) 1988-05-30 1988-05-30 薄膜形成装置の基板カート

Publications (2)

Publication Number Publication Date
JPH01174922U JPH01174922U (en]) 1989-12-13
JPH0650983Y2 true JPH0650983Y2 (ja) 1994-12-21

Family

ID=31296596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7138888U Expired - Lifetime JPH0650983Y2 (ja) 1988-05-30 1988-05-30 薄膜形成装置の基板カート

Country Status (1)

Country Link
JP (1) JPH0650983Y2 (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0691030B2 (ja) * 1988-06-13 1994-11-14 富士電機株式会社 縦型プラズマｃｖｄ装置
KR101210555B1 (ko) * 2008-06-06 2012-12-10 가부시키가이샤 아루박 박막 태양전지 제조 장치
JP2011124348A (ja) * 2009-12-09 2011-06-23 Ulvac Japan Ltd 基板ホルダー及び基板搬送装置
JP5682911B2 (ja) * 2010-10-15 2015-03-11 株式会社アルバック 基板ホルダー及び基板搬送装置

Also Published As

Publication number Publication date
JPH01174922U (en]) 1989-12-13

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